N.C.S.R. "Demokritos"


Department of Materials Science

small logo

Molecular Beam Epitaxy and Surface Analysis Laboratory

Researcher in charge: A. Dimoulas

The main activity at the Molecular Beam Epitaxy (MBE) and Surface Analysis Laboratory (SAL) is the preparation and characterization of (complex) high-κ metal oxides on semiconductors for applications in Nanoelectronics. The oxide MBE is unique infrastructure in Greece operating since year 2000, while in 2008 the laboratory has been extended by the addition of a number of surface analytical techniques such as X-ray and Ultraviolet Photoelectron Spectroscopy (XPS/UPS) and Low Energy Ion Scattering Spectroscopy (LEISS). The XPS system is integrated with the MBE allowing for in-situ surface and interfaces characterization. In addition, the laboratory is equipped with electrical admittance spectroscopy which allows the evaluation of dielectric constant and relaxation phenomena by frequency dependent capacitance and conductance measurements on metal-insulator semiconductor (MIS) structures. The research team has established a leading role in European funded research coordinating several large consortia of key integrated device and equipment manufacturers such as STMicroelectronics, IBM-Zurich, Philips/NXP, AIXTRON, RIBER, as well as large technology development laboratories (IMEC, CEA-LETI) and top quality research organizations (EPFL, Max Planck Institute). The MBE-SAL lab is at the forefront of research worldwide for the development of a viable Ge MOS technology with a number of invited presentations, conferences organization, press conference, book editing etc. A detailed account of the lab activities can be found in the website: http://www.ims.demokritos.gr/MBE_LAB

Research Topics


NameProfessionRoleEmail addressTelephone
Athanasios DimoulasPhysicistResearcher Adimoulas@ims.demokritos.gr210 6503340
Gerasimos PanyiotatosVisiting Scientistypanayiotatos@ims.demokritos.gr210 6503341
Sigiava Aminalragia GiaminiElectro Engineer, TEEPhD Studentsagiamini@ims.demokritos.gr+ 30 210 6503325
Evagelos GoliasPhysicistPhD Studentvgolias@ims.demokritos.gr210 6503341
Jose Marquez VelascoPhysicistPhD Studentjmvelasco@ims.demokritos.gr+ 30 210 6503394
Department of Materials Science, N.C.S.R. "Demokritos", 153 10 Aghia Paraskevi, Attiki, phone: +30 210 6503381, fax: +30 210 6519430
Contact Us | ©2008 Institute of Materials Science, N.C.S.R. "Demokritos"